DocumentCode

2380698

Title

Application of USM to micromachining by on-the-machine tool fabrication

Author

Egashira, Kai ; Masuzawa, Takahisa ; Fujino, Masatoshi ; Sun, Xi-Qing

Author_Institution

The University of Tokyo

Volume

3

fYear

2000

fDate

2000

Firstpage

106

Lastpage

115

Keywords

Ceramics; Fabrication; Glass; Machining; Magnetic heads; Micromachining; Silicon; Soldering; Ultrasonic transducers; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on

Print_ISBN

0-7803-6486-4

Type

conf

DOI

10.1109/KORUS.2000.866068

Filename

866068