Study of MEMS microcantilever based on their geometric parameters

Author

Saha, Simanto ; Topkar, Anita ; Rathod, S.S.

Author_Institution

Dept. of Electron. & Telecommun., Univ. of Mumbai, Mumbai, India

fYear

2014

fDate

8-10 May 2014

Firstpage

163

Lastpage

167

Abstract

A sensor type which is based on microcantilever beam configuration is very attractive for chemical sensing applications because of its effective sensitivity. Adsorption onto the surface of sensing element causes deflection, shifting its resonance frequency and changing its surface stress. This allows accurate measurement of adsorbed analytes in range of nanograms. This sensing method has been known to be highly sensitive, cheap, compact and robust. In this paper, the shift in resonant frequency, displacement and stress of the microcantilever for different geometric parameters has been studied.

Keywords

adsorption; cantilevers; chemical sensors; displacement measurement; frequency measurement; microsensors; stress measurement; surface topography measurement; MEMS microcantilever beam; adsorbed analyte measurement; chemical sensing application; displacement measurement; geometric parameter; resonant frequency measurement; surface adsorption; surface stress measurement; Chemicals; Piezoresistance; MEMS; Microcantilever; Modulus of Elasticity; Resonance Frequency; Sensors; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Communication Control and Computing Technologies (ICACCCT), 2014 International Conference on

Conference_Location

Ramanathapuram

Print_ISBN

978-1-4799-3913-8

Type

conf

DOI

10.1109/ICACCCT.2014.7019391

Filename

7019391