• DocumentCode
    2382770
  • Title

    Measurement of thermally induced strains on flip chip and chip scale packages

  • Author

    Vogel, D. ; Kaulfersch, E. ; Simon, J. ; Kühnert, R. ; Schubert, A. ; Michel, B.

  • Author_Institution
    Dept. of Mech. Reliability & Micro Mater., Fraunhofer Inst. IZM, Berlin, Germany
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    232
  • Abstract
    The authors developed and made use of the microDAC deformation measurement technique to determine strain fields on thermally stressed, cross sectioned FC and CSP specimens. The method allows one to resolve strain fields inside tiny structures like e.g. solder interconnects or conductive adhesive layers. It is based on comparison of digitized micrographs obtained from different object load states. Optical, SEM and laser scanning microscopy are applied for image capture. The paper presents results of strain analysis in interconnects of different flip chip configurations and chip scale package types e.g., global shear of outward bumps is almost completely suppressed in most flip chip cases by underfilling. Furthermore, bump deformation can be strongly influenced by the local appearance of glass fabrics in organic laminates used as board materials. A main demand on chip scale package reliability is the avoidance of too large thermal solder ball strains, which lead to material fatigue. Different packages with rigid and flex interposers tackle the stress compensation problem in a different way. A first attempt is made to compare some of them based on experimental strain and warpage measurements
  • Keywords
    adhesives; chip scale packaging; encapsulation; flip-chip devices; integrated circuit interconnections; integrated circuit reliability; laminates; optical microscopy; scanning electron microscopy; thermal stresses; SEM; bump deformation; chip scale packages; conductive adhesive layers; flip chip packages; global shear; image capture; laser scanning microscopy; material fatigue; microDAC deformation measurement technique; object load states; optical microscopy; organic laminates; solder interconnects; strain fields; stress compensation problem; thermally induced strains; thermally stressed specimens; underfilling; Capacitive sensors; Chip scale packaging; Conductive adhesives; Flip chip; Measurement techniques; Optical microscopy; Scanning electron microscopy; Semiconductor device measurement; Strain measurement; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal and Thermomechanical Phenomena in Electronic Systems, 2000. ITHERM 2000. The Seventh Intersociety Conference on
  • Conference_Location
    Las Vegas, NV
  • ISSN
    1089-9870
  • Print_ISBN
    0-7803-5912-7
  • Type

    conf

  • DOI
    10.1109/ITHERM.2000.866196
  • Filename
    866196