Title :
Beam-astigmatism in laser interferometry
Author :
Cordiali, L. ; Mana, G. ; Cavagnero, G. ; Bergamin, A.
Author_Institution :
CNR, Torino, Italy
Abstract :
We developed a null laser interferometer capable of 10 /spl mu/rad resolution in fringe division for the measurement of the silicon
Keywords :
Gaussian distribution; X-ray applications; aberrations; constants; elemental semiconductors; lattice constants; light diffraction; light interferometry; measurement by laser beam; probability; silicon; CCD image sensor; Gaussian distribution; Si; X-ray interferometry; diffraction; fringe division; laser interferometry; measurement uncertainty; null laser interferometer; wavefront astigmatism; Displacement measurement; Interference; Laser beams; Lattices; Optical interferometry; Optical sensors; Silicon; Vision defects; X-ray diffraction; X-ray lasers;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1996 Conference on
Conference_Location :
Braunschweig, Germany
Print_ISBN :
0-7803-3376-4
DOI :
10.1109/CPEM.1996.546652
