• DocumentCode
    2383155
  • Title

    Silicon based electret relays

  • Author

    Ichiya, Mitsuo ; NISHIMURA, Hiromi ; Kasano, Fumishiro ; Lewiner, Jacques ; Perino, Didier

  • Author_Institution
    Matsushita Electr. Works. Ltd., Osaka, Japan
  • fYear
    1994
  • fDate
    7-9 Sep 1994
  • Firstpage
    955
  • Lastpage
    960
  • Abstract
    In this paper we present a new family of integrated electret relays, the various parts of them being made by micromachining of silicon wafers. Ageing curves of electrets which are directly made on the silicon substrates will be shown, and new mechanical designs will be described
  • Keywords
    ageing; electrets; electrostatic devices; elemental semiconductors; micromachining; semiconductor relays; semiconductor-insulator boundaries; silicon; silicon compounds; Si; Si based electret relays; Si wafers; Si-SiO2; SiO2 electrets; ageing curves; integrated electret relays; mechanical designs; micromachining; Aging; Electrets; Electrodes; Electromagnetic forces; Electrostatics; Iron; Relays; Silicon; Substrates; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrets, 1994. (ISE 8), 8th International Symposium on
  • Conference_Location
    Paris
  • Print_ISBN
    0-7803-1940-0
  • Type

    conf

  • DOI
    10.1109/ISE.1994.515254
  • Filename
    515254
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2383155