Title :
Computational study toward micro electronics engineering
Author :
Shiraishi, K. ; Yamaguchi, K. ; Yang, M. ; Park, S.G. ; Kamiya, K. ; Shigeta, Y. ; Magyari-Kope, B. ; Niwa, M. ; Nishi, Y.
Author_Institution :
Grad. Sch. of Pure & Appl. Sci., Univ. of Tsukuba, Tsukuba, Japan
Abstract :
Computational Science became crucial techniques for designing future micro electronics engineering. In this paper, we describe the examples which aim the designing of future micro electronics devices such as charge trap memories and resistive random access memories based on the computational science.
Keywords :
electronic engineering; integrated circuit design; random-access storage; charge trap memory; computational science; microelectronics device design; microelectronics engineering; resistive random access memory; Atomic layer deposition; Electron traps; MONOS devices; Materials; Silicon compounds; Switches;
Conference_Titel :
Microelectronics (MIEL), 2012 28th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4673-0237-1
DOI :
10.1109/MIEL.2012.6222797
