Design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor

Author

Setiadi, D. ; Regtien, P.P.L.

Author_Institution

Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands

fYear

1994

fDate

7-9 Sep 1994

Firstpage

967

Lastpage

972

Abstract

This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values

Keywords

electron device noise; etching; infrared detectors; intelligent sensors; isolation technology; polymer blends; polymer films; pyroelectric detectors; silicon; Si; VDF/TrFE copolymer-on-silicon pyroelectric sensor; design; dielectric noise; etching; noise sources; one-dimensional diffusion equation; optimal design; output current; pyroelectric multilayer structure; sensor element; smart sensor; thermal isolation; Aluminum; Detectors; Electrodes; Intelligent sensors; Polymer films; Pyroelectricity; Silicon; Substrates; Thermal sensors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrets, 1994. (ISE 8), 8th International Symposium on

Conference_Location

Paris

Print_ISBN

0-7803-1940-0

Type

conf

DOI

10.1109/ISE.1994.515256

Filename

515256