Title :
Design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor
Author :
Setiadi, D. ; Regtien, P.P.L.
Author_Institution :
Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands
Abstract :
This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values
Keywords :
electron device noise; etching; infrared detectors; intelligent sensors; isolation technology; polymer blends; polymer films; pyroelectric detectors; silicon; Si; VDF/TrFE copolymer-on-silicon pyroelectric sensor; design; dielectric noise; etching; noise sources; one-dimensional diffusion equation; optimal design; output current; pyroelectric multilayer structure; sensor element; smart sensor; thermal isolation; Aluminum; Detectors; Electrodes; Intelligent sensors; Polymer films; Pyroelectricity; Silicon; Substrates; Thermal sensors; Voltage;
Conference_Titel :
Electrets, 1994. (ISE 8), 8th International Symposium on
Conference_Location :
Paris
Print_ISBN :
0-7803-1940-0
DOI :
10.1109/ISE.1994.515256
