Title :
MSM photodetector with an integrated microlens array for improved optical coupling
Author :
Ozelo, H.F.B. ; De Barros, L. E M ; Nabet, B. ; Neto, L.G. ; Romero, M.A. ; Swart, J.W.
Author_Institution :
Lab. de Pesquisa em Dispositivos, Campinas Univ., Brazil
Abstract :
We describe the fabrication of an array of integrated cylindrical microlenses on top of a single GaAs MSM photodetector. Preliminary experimental data already shows an increase of about 11% on the photocurrent of the MSM photodiode as a result of the improved optical coupling efficiency. However ray-tracing calculations indicate that this increase can reach values as high as 50% with a more careful lens design
Keywords :
gallium arsenide; integrated optoelectronics; metal-semiconductor-metal structures; microlenses; optical arrays; photoconductivity; photodetectors; photodiodes; ray tracing; MSM photodetector; MSM photodiode; improved optical coupling efficiency; integrated cylindrical microlens fabrication; integrated microlens array; lens design; optical coupling; photocurrent; ray-tracing calculations; single GaAs MSM photodetector; Gallium arsenide; Lenses; Microoptics; Optical coupling; Optical design; Optical device fabrication; Photoconductivity; Photodetectors; Photodiodes; Ray tracing;
Conference_Titel :
Microwave and Optoelectronics Conference, 1999. SBMO/IEEE MTT-S, APS and LEOS - IMOC '99. International
Conference_Location :
Rio de Janeiro
Print_ISBN :
0-7803-5807-4
DOI :
10.1109/IMOC.1999.866253
