DocumentCode
2384739
Title
Broadband performance of 110 GHz interconnects built in HRSi-based membrane technology
Author
Arz, Uwe ; Rohland, Martina ; Kuhlmann, Karsten ; Buttgenbach, Stephanus
Author_Institution
Phys.-Tech. Bundesanstalt, Braunschweig, Germany
fYear
2012
fDate
13-16 May 2012
Firstpage
3
Lastpage
6
Abstract
In this paper we characterize broadband low-loss interconnects built in membrane technology on highly-resistive silicon (HRSi) substrates. Test structures were fabricated and measured in a frequency range from 0.1 to 110 GHz. The measured propagation constant of the membrane CPW part of the interconnect agrees well with analytical calculations in the entire frequency band.
Keywords
radiofrequency interconnections; HRSi-based membrane technology; analytical calculations; broadband low-loss interconnects; broadband performance; built in membrane technology; frequency 110 GHz; frequency band; highly-resistive silicon substrates; propagation constant; test structures;
fLanguage
English
Publisher
ieee
Conference_Titel
Signal and Power Integrity (SPI), 2012 IEEE 16th Workshop on
Conference_Location
Sorrento
Print_ISBN
978-1-4673-1503-6
Type
conf
DOI
10.1109/SaPIW.2012.6222881
Filename
6222881
Link To Document