Title :
Broadband performance of 110 GHz interconnects built in HRSi-based membrane technology
Author :
Arz, Uwe ; Rohland, Martina ; Kuhlmann, Karsten ; Buttgenbach, Stephanus
Author_Institution :
Phys.-Tech. Bundesanstalt, Braunschweig, Germany
Abstract :
In this paper we characterize broadband low-loss interconnects built in membrane technology on highly-resistive silicon (HRSi) substrates. Test structures were fabricated and measured in a frequency range from 0.1 to 110 GHz. The measured propagation constant of the membrane CPW part of the interconnect agrees well with analytical calculations in the entire frequency band.
Keywords :
radiofrequency interconnections; HRSi-based membrane technology; analytical calculations; broadband low-loss interconnects; broadband performance; built in membrane technology; frequency 110 GHz; frequency band; highly-resistive silicon substrates; propagation constant; test structures;
Conference_Titel :
Signal and Power Integrity (SPI), 2012 IEEE 16th Workshop on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4673-1503-6
DOI :
10.1109/SaPIW.2012.6222881
