• DocumentCode
    2384739
  • Title

    Broadband performance of 110 GHz interconnects built in HRSi-based membrane technology

  • Author

    Arz, Uwe ; Rohland, Martina ; Kuhlmann, Karsten ; Buttgenbach, Stephanus

  • Author_Institution
    Phys.-Tech. Bundesanstalt, Braunschweig, Germany
  • fYear
    2012
  • fDate
    13-16 May 2012
  • Firstpage
    3
  • Lastpage
    6
  • Abstract
    In this paper we characterize broadband low-loss interconnects built in membrane technology on highly-resistive silicon (HRSi) substrates. Test structures were fabricated and measured in a frequency range from 0.1 to 110 GHz. The measured propagation constant of the membrane CPW part of the interconnect agrees well with analytical calculations in the entire frequency band.
  • Keywords
    radiofrequency interconnections; HRSi-based membrane technology; analytical calculations; broadband low-loss interconnects; broadband performance; built in membrane technology; frequency 110 GHz; frequency band; highly-resistive silicon substrates; propagation constant; test structures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Signal and Power Integrity (SPI), 2012 IEEE 16th Workshop on
  • Conference_Location
    Sorrento
  • Print_ISBN
    978-1-4673-1503-6
  • Type

    conf

  • DOI
    10.1109/SaPIW.2012.6222881
  • Filename
    6222881