Miniaturized inorganic electret layers

Author

Thielemann, C. ; Amjadi, H. ; Sapieha, J. Klemberg ; Martinu, L. ; Wertheimer, M.R.

Author_Institution

Inst. for Telecommun. & Electroacoust., Tech. Univ. Darmstadt, Germany

fYear

1994

fDate

7-9 Sep 1994

Firstpage

1022

Lastpage

1027

Abstract

Silicon dioxide and nitride based materials are interesting inorganic electrets for applications in the field of micromechanics and sensor technologies since they are compatible to the silicon technology. It was the motivation for this work to find new suitable electret materials with good mechanical properties for the application in a micromachined electret condenser microphone. SiO₂, Si₃N₄ single and double layers and SiON layers are investigated in terms of chargeability and long-term charge-stability. The main emphasis is put on the miniaturization of electret layers. The lateral dimensions of the electrets are reduced down to 2 mm and the characteristics under different environmental conditions are described

Keywords

electrets; insulating thin films; micromachining; microphones; silicon compounds; 2 mm; Si₃N₄; SiO₂; SiON; chargeability; lateral dimensions; long-term charge-stability; micromechanics; miniaturized inorganic electret layers; sensor technologies; Biomembranes; Compressive stress; Electrets; Inorganic materials; Mechanical sensors; Microphones; Plasma temperature; Silicon; Stability; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrets, 1994. (ISE 8), 8th International Symposium on

Conference_Location

Paris

Print_ISBN

0-7803-1940-0

Type

conf

DOI

10.1109/ISE.1994.515265

Filename

515265