Title :
Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130)
Abstract :
The following topics are dealt with: manufacturing strategy and management; 300mm fab operation; manufacturing control and execution; process and metrology equipment; material optimization; environmental issues; process optimization; yield modeling and defect reduction
Keywords :
environmental factors; integrated circuit manufacture; integrated circuit measurement; integrated circuit modelling; integrated circuit testing; integrated circuit yield; optimisation; process control; 300 mm; defect reduction; environmental issues; fab operation; management; manufacturing control; manufacturing strategy; material optimization; metrology equipment; process equipment; process optimization; yield modeling;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location :
Tokyo, Japan
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993603
