DocumentCode
2385984
Title
Charging regimes of insulators under low energy electron beam (200 eV to 10 keV)
Author
Blaise, G. ; Braga, D.
Author_Institution
Lab. de Phys. des Solides, Univ. de Paris-Sud, Orsay, France
fYear
2002
fDate
2002
Firstpage
11
Lastpage
14
Abstract
Charging properties of insulators are investigated with a SEM by measuring the amount of trapped charges and the SEE yield δ as a function of current density J and dose D, in a wide energy range 200 eV - 10 keV. Three stationary charging regimes (self-regulation, ageing, degradation) depending on J have been identified.
Keywords
ageing; current density; electron beam effects; insulating materials; insulators; scanning electron microscopy; secondary electron emission; static electrification; 200 eV to 10 keV; SEE yield; SEM; ageing; current density; degradation; dose; insulators; low energy electron beam; secondary electron emission yield; self-regulation; stationary charging regimes; trapped charges; Current density; Current measurement; Density measurement; Detectors; Electron beams; Electron emission; Electron traps; Energy measurement; Insulation; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 2002. ISE 11. Proceedings. 11th International Symposium on
Print_ISBN
0-7803-7560-2
Type
conf
DOI
10.1109/ISE.2002.1042933
Filename
1042933
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