Title :
Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab
Author :
Kurosaki, Ryo ; Shimura, Toshikatsu ; Komada, Hiromi ; Kojima, Tadayuki ; Watanabe, Yoshio
Author_Institution :
Inf. Technol. Dept, Fujitsu Ltd., Tokyo, Japan
Abstract :
A 300 mm generation automatic transport system, transport system with the "interbay and intrabay diverging and converging method" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.
Keywords :
DRAM chips; integrated circuit manufacture; 300 mm; 300 mm fab; AMHS design; DRAM; OHT; diverging/converging method; generation automatic transport system; high efficiency; interbay; intrabay; low cost; short lead time; simulation; stockers; Costs; Lead time reduction; Transportation; Vehicles; Virtual manufacturing;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993614
