Low cost and short lead time AMHS design using interbay/intrabay diverging and converging IMP method for 300 mm fab

Author

Kurosaki, Ryo ; Shimura, Toshikatsu ; Komada, Hiromi ; Kojima, Tadayuki ; Watanabe, Yoshio

Author_Institution

Inf. Technol. Dept, Fujitsu Ltd., Tokyo, Japan

fYear

2000

fDate

2000

Firstpage

48

Lastpage

51

Abstract

A 300 mm generation automatic transport system, transport system with the "interbay and intrabay diverging and converging method" (the diverging/converging method) using OHT has been proposed. Its practical utilization however has been retarded because this method requires a large system scale, and therefore requires very sophisticated control. We have formulated a plan of combining two or more diverging/converging systems and connecting them by stockers. The result of simulation has indicated that a shorter lead time and low-cost transport system could be constructed with this method.

Keywords

DRAM chips; integrated circuit manufacture; 300 mm; 300 mm fab; AMHS design; DRAM; OHT; diverging/converging method; generation automatic transport system; high efficiency; interbay; intrabay; low cost; short lead time; simulation; stockers; Costs; Lead time reduction; Transportation; Vehicles; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on

ISSN

1523-553X

Print_ISBN

0-7803-7392-8

Type

conf

DOI

10.1109/ISSM.2000.993614

Filename

993614