DocumentCode
2386455
Title
Multi-Gate MOSFETs with Back-Gate Control
Author
Hiramoto, Toshiro ; Nagumo, Toshiharu
Author_Institution
Inst. of Ind. Sci., Tokyo Univ.
fYear
0
fDate
0-0 0
Firstpage
1
Lastpage
2
Abstract
In this paper, we develop a design guideline for multi-gate MOSFET for Vth control. The design window of channel height (tSi) and width (wSi) to obtain both sufficiently large gamma and suppressed SCE in hp45 node LSTP devices is shown by 3D device simulation. The channel width dependence of gamma is also experimentally examined
Keywords
MOSFET; circuit simulation; low-power electronics; voltage control; 3D device simulation; LSTP devices; back-gate control; low standby power; multigate MOSFET; short channel effect; suppressed SCE; Design methodology; Electron beams; FinFETs; Guidelines; Leakage current; Lithography; MOSFETs; Shape; Silicon; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Circuit Design and Technology, 2006. ICICDT '06. 2006 IEEE International Conference on
Conference_Location
Padova
Print_ISBN
1-4244-0097-X
Type
conf
DOI
10.1109/ICICDT.2006.220797
Filename
1669384
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