Title :
A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for packaged MEMS performance monitoring
Author :
Kubota, Masanori ; Okada, Toshihiro ; Mita, Yoshio ; Sugiyama, Masakazu ; Nakano, Yoshiaki
Author_Institution :
Grad. Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
A nano-gap Pirani gauge for integration with bulk MEMS sensors and actuators was fabricated by cutting-edge high aspect ratio bulk micromachining. The 150nm-wide, 5000nm-dep vertical trench enables wide-range pressure measurement; the device showed sensitity in all the tested range from 6.3 to 101.3kPa. ±0.27% of power variation around 35 mW was measured for ±1 kPa of pressure change from atmospheric pressure.
Keywords :
microactuators; micromachining; microsensors; MEMS actuators; bulk MEMS sensors; bulk micromachined vertical nano-gap Pirani wide-range pressure test structure; bulk micromachining; nano-gap Pirani gauge; packaged MEMS performance monitoring; Etching; Fabrication; Heat sinks; Heat transfer; Micromechanical devices; Monitoring; Packaging; Pressure measurement; Testing; Thermal conductivity;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on
Conference_Location :
Hiroshima
Print_ISBN :
978-1-4244-6912-3
Electronic_ISBN :
978-1-4244-6914-7
DOI :
10.1109/ICMTS.2010.5466871
