DocumentCode :
2386578
Title :
An efficient treatment technique for TMAH wastewater by catalytic oxidation
Author :
Hirano, K. ; Okamura, J. ; Taira, T. ; Sano, K. ; Toyoda, A. ; Ikeda, M.
Author_Institution :
NEC Corp., Kawasaki, Japan
fYear :
2000
fDate :
2000
Firstpage :
139
Lastpage :
142
Abstract :
We have developed a TMAH wastewater treatment technique that consists of a combination of two novel decomposition processes: pyrolyzing TMAH to TMA and decomposing TMA to N2, CO2 and H2O by means of a selective catalytic oxidation for nitrogenous compounds. We have tested a system using this technique in long-term treatment of the actual wastewater and have found it to be sufficiently practical. The running cost of the treatment system using our technique would be about 1/9 the cost of disposing the wastewater as industrial waste, and about 2.3 times that of biological treatment. Compared with biological treatment, our system is tolerant to many treatment conditions, and operation management is much easier. Furthermore, our system occupies only about 1/6 the area of a biological treatment system
Keywords :
catalysis; decomposition; environmental factors; organic compounds; oxidation; photolithography; pyrolysis; CO2; H2O; N2; TMA; TMAH wastewater; decomposition; operation management; photolithography; pyrolysis; selective catalytic oxidation; tetramethylammoniumhydroxide; Costs; Industrial waste; Lithography; National electric code; Oxidation; Production facilities; System testing; Thermal decomposition; Thermal spraying; Wastewater treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location :
Tokyo
ISSN :
1523-553X
Print_ISBN :
0-7803-7392-8
Type :
conf
DOI :
10.1109/ISSM.2000.993634
Filename :
993634
Link To Document :
بازگشت