Title :
[Copyright notice]
Abstract :
The following topics are dealt with: DMOS power transistor; MEMS; CMOS image sensor technology; ring oscillator; microfluidics; phase change memory test structure; nanowire FET; SOI on-chip inductor; through silicon vias; analog circuit; and SRAM.
Keywords :
CMOS image sensors; SRAM chips; field effect transistors; micromechanical devices; power transistors; silicon-on-insulator; three-dimensional integrated circuits; CMOS image sensor technology; DMOS power transistor; MEMS; SOI on-chip inductor; SRAM; analog circuit; microelectronic test structure; microfluidics; nanowire FET; phase change memory test structure; ring oscillator; through silicon vias;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on
Conference_Location :
Hiroshima
Print_ISBN :
978-1-4244-6912-3
Electronic_ISBN :
978-1-4244-6914-7
DOI :
10.1109/ICMTS.2010.5466881
