Title :
Bio Nano Process: Fabrication of Nanoelectronic Devices Using Protein Supramolecules
Author :
Yamashita, Ichiro
Author_Institution :
Adv. Technol. Res. Labs., Matsushita Electr. Ind. Co., Ltd, Kyoto
Abstract :
A biological method for making the components of nano-electronic devices is proposed, which is named bio nano process (BNP). Using the BNP, the nanodot memory nodes of the floating gate memory were fabricated and excellent endurance and retention time were demonstrated
Keywords :
nanobiotechnology; nanoelectronics; bio nano process; floating gate memory; nanodot memory; nanoelectronic devices fabrication; protein supramolecules; Fabrication; Inorganic materials; Nanobioscience; Nanoscale devices; Nanostructures; Peptides; Proteins; Self-assembly; Silicon; Substrates;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
Electronic_ISBN :
1-4244-0439-8
DOI :
10.1109/IEDM.2006.346808
