Title :
CMOS Devices - Strained Silicon
Keywords :
Capacitive sensors; Electrons; Germanium silicon alloys; Instruments; MOS devices; MOSFET circuits; Microelectronics; Physics; Silicon carbide; Silicon germanium;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
DOI :
10.1109/IEDM.2006.346809