DocumentCode
2386982
Title
Semi-automatic tuning of PID gains for Atomic Force Microscopes
Author
Abramovitch, Daniel Y. ; Hoen, Storrs ; Workman, Richard
Author_Institution
Nanotechnol. Group at Agilent Labs., Santa Clara, CA
fYear
2008
fDate
11-13 June 2008
Firstpage
2684
Lastpage
2689
Abstract
The control of a typical commercial Atomic Force Microscope (AFM) is through some variant on a Proportional, Integral, Derivative (PID) controller. Typically, the gains are hand tuned so as to keep the bandwidth of the system far below the first resonant frequency of the actuator. This paper shows a straightforward method of selecting PID gains from the actuator model so as to allow considerably higher bandwidths.
Keywords
atomic force microscopy; physical instrumentation control; position control; three-term control; tuning; PID controller; actuator; atomic force microscope; resonant frequency; semi automatic PID tuning; Actuators; Atomic force microscopy; Bandwidth; Force control; PD control; Pi control; Proportional control; Resonant frequency; Three-term control; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 2008
Conference_Location
Seattle, WA
ISSN
0743-1619
Print_ISBN
978-1-4244-2078-0
Electronic_ISBN
0743-1619
Type
conf
DOI
10.1109/ACC.2008.4586898
Filename
4586898
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