DocumentCode :
2387017
Title :
TYM system: an integrated tool for inherent line yield improvements for entire fab
Author :
Aloni, Cohen
Author_Institution :
Zur Aloni Res. Ltd, Hod Hasharon, Israel
fYear :
2000
fDate :
2000
Firstpage :
237
Lastpage :
240
Abstract :
Total line yield management (TYM) is a new concept that analyzes the wafer loss all over the fab and transforms the data elements to an effective knowledge base for smart uses. TYM system enables dramatic cost saving. The TYM system is the effective way for achieving 99% factory line yield. A factory with excellent performance achieves line yield results of approx. 94%. A comparison between total line yield management (TYM) verses the traditional line yield management emphasis the huge enhancement. In terms of direct cost that was wasted in 300-mm, the contribution could be more than $19.322 million. In terms of marketing loss the penalty is much higher. Excellent fabs will save money and less effective fabs the line yield improvement will help survivability
Keywords :
integrated circuit yield; 300 mm; TYM system; cost saving; data elements; factory line yield; integrated tool; line yield improvements; total line yield management; wafer loss; Costs; Environmental economics; Equations; Financial management; Humans; Manufacturing processes; Process planning; Production facilities; Semiconductor device modeling; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location :
Tokyo
ISSN :
1523-553X
Print_ISBN :
0-7803-7392-8
Type :
conf
DOI :
10.1109/ISSM.2000.993657
Filename :
993657
Link To Document :
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