• DocumentCode
    2387017
  • Title

    TYM system: an integrated tool for inherent line yield improvements for entire fab

  • Author

    Aloni, Cohen

  • Author_Institution
    Zur Aloni Res. Ltd, Hod Hasharon, Israel
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    237
  • Lastpage
    240
  • Abstract
    Total line yield management (TYM) is a new concept that analyzes the wafer loss all over the fab and transforms the data elements to an effective knowledge base for smart uses. TYM system enables dramatic cost saving. The TYM system is the effective way for achieving 99% factory line yield. A factory with excellent performance achieves line yield results of approx. 94%. A comparison between total line yield management (TYM) verses the traditional line yield management emphasis the huge enhancement. In terms of direct cost that was wasted in 300-mm, the contribution could be more than $19.322 million. In terms of marketing loss the penalty is much higher. Excellent fabs will save money and less effective fabs the line yield improvement will help survivability
  • Keywords
    integrated circuit yield; 300 mm; TYM system; cost saving; data elements; factory line yield; integrated tool; line yield improvements; total line yield management; wafer loss; Costs; Environmental economics; Equations; Financial management; Humans; Manufacturing processes; Process planning; Production facilities; Semiconductor device modeling; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    0-7803-7392-8
  • Type

    conf

  • DOI
    10.1109/ISSM.2000.993657
  • Filename
    993657