DocumentCode
2387017
Title
TYM system: an integrated tool for inherent line yield improvements for entire fab
Author
Aloni, Cohen
Author_Institution
Zur Aloni Res. Ltd, Hod Hasharon, Israel
fYear
2000
fDate
2000
Firstpage
237
Lastpage
240
Abstract
Total line yield management (TYM) is a new concept that analyzes the wafer loss all over the fab and transforms the data elements to an effective knowledge base for smart uses. TYM system enables dramatic cost saving. The TYM system is the effective way for achieving 99% factory line yield. A factory with excellent performance achieves line yield results of approx. 94%. A comparison between total line yield management (TYM) verses the traditional line yield management emphasis the huge enhancement. In terms of direct cost that was wasted in 300-mm, the contribution could be more than $19.322 million. In terms of marketing loss the penalty is much higher. Excellent fabs will save money and less effective fabs the line yield improvement will help survivability
Keywords
integrated circuit yield; 300 mm; TYM system; cost saving; data elements; factory line yield; integrated tool; line yield improvements; total line yield management; wafer loss; Costs; Environmental economics; Equations; Financial management; Humans; Manufacturing processes; Process planning; Production facilities; Semiconductor device modeling; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
0-7803-7392-8
Type
conf
DOI
10.1109/ISSM.2000.993657
Filename
993657
Link To Document