Title :
Displays, Sensors, and MEMS - MEMS and NEMS
Keywords :
Acoustic waves; CMOS process; Dielectrics; Displays; Gyroscopes; Micromechanical devices; Nanoelectromechanical systems; Nonvolatile memory; Silicon; Solid state circuits;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
DOI :
10.1109/IEDM.2006.346825
