Title :
A Post-CMOS Concave-Suspending MEMS Process in Standard Silicon Wafers for High-Performance Solenoidal-DNA-Configured Micro-Transformers
Author :
Gu, Lei ; Li, Xinxin
Author_Institution :
Shanghai Inst. of Microsyst. & Inf. Technol., Chinese Acad. of Sci., Shanghai
Abstract :
Solenoidal-DNA-configured transformers are fabricated in standard silicon substrate by using a post-CMOS concave-suspending MEMS process. The concavely suspended structure of the transformer effectively depresses the substrate effects including eddy current and capacitive coupling between the coil and the substrate, thereby, achieving both high Q-factor and high resonant frequency for the self-inductors. With broad useable frequency band for high mutual reactive coupling coefficient, high available gain is measured in wide frequency band for high performance radio frequency ICs
Keywords :
Q-factor; eddy currents; inductors; micromechanical devices; transformers; Q-factor; capacitive coupling; eddy current; post-CMOS concave-suspending MEMS process; solenoidal-DNA-configured transformers; substrate effects; Coils; Eddy currents; Frequency measurement; Micromechanical devices; Mutual coupling; Performance gain; Q factor; Resonant frequency; Silicon; Transformers;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0438-X
Electronic_ISBN :
1-4244-0439-8
DOI :
10.1109/IEDM.2006.346829
