A study of micro machining using chemical etching process

In this paper, microelectrodes was machined for EDM process using a supersonic aided chemical etching. Dopper was cut to be 0.1mm by a wire EDM machine from original diameter 3mm in the first step. Electrodes were then machined by super sonic aided chemical etching and electrolysis. Removal rate of chemical etching was increased by supersonic aided agitation. Micro electrodes can be achieved to be a diameter smaller than 10μm by proposed technology. Multi-headed micro electrode can be processed by combined technology of wire EDM machine, electrolysis, and supersonic aided chemical etching. Each diameter can be machined to approximately 30 μm. Micro holes were processed by the multi-headed electrodes using EDM process.