Title :
The application of micro-mechanics on MEMS design
Author :
Liang, X.Y. ; Liu, X.M. ; Zhu, Z.G.
Abstract :
One of important part on MEMS designing is to analyze mechanical behavior of the material under the microdimension and meso-dimension .This paper obtain a method of developing material??s geometry models as well as mechanical models in micro-dimension, according to crystal lattice theory and lattice kinetics theory .This paper use the method to analyze a microaccelerometer deformation under 1O??g acceleration load, and the result shows feasibility of this method.
Keywords :
Crystalline materials; Crystallization; Deformable models; Lattices; Materials science and technology; Mechatronics; Micromechanical devices; Silicon; Solid modeling; Space technology;
Conference_Titel :
Intelligent Mechatronics and Automation, 2004. Proceedings. 2004 International Conference on
Conference_Location :
Chengdu, China
Print_ISBN :
0-7803-8748-1
DOI :
10.1109/ICIMA.2004.1384205
