Title :
Development of a new ultrasonic liquid flowmeter for very low flow rate applicable to a thin pipe
Author :
Ishikawa, Hiroaki ; Takamoto, Masaki ; Shimizu, Kazuyoshi ; Monji, Hideaki ; Matsui, Goichi
Author_Institution :
Nat. Res. Lab. of Metrol., Ibaraki, Japan
Abstract :
A new ultrasonic liquid flowmeter has been developed to measure very low flow rate. This flow meter consists of small disk ultrasonic transducers and measuring pipe whose diameter is less than 1 mm. The measuring pipe passed through the ultrasonic transducer two times making the loop feature. A very low flow rate less than 1ml/min can be measured accurately and stably
Keywords :
flowmeters; pipe flow; ultrasonic transducers; loop feature; measuring pipe; small disk ultrasonic transducers; thin pipe; ultrasonic liquid flowmeter; very low flow rate; Electronics industry; Fluid flow; Fluid flow measurement; Laboratories; Metrology; Pistons; Servomechanisms; Systems engineering and theory; Ultrasonic transducers; Ultrasonic variables measurement;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993693
