Title :
Process optimization and interface cotrol in chemical vapor deposition of high dielectric constant thin films
Author :
Gao, Y. ; Perkins, C.L. ; Henderson, M.A. ; Rogers, J.W., Jr.
Author_Institution :
Interfacial and Processing Sciences, Pacific Northwest National Laboratory
Keywords :
Binary search trees; Chemical vapor deposition; Chemistry; Dielectric materials; Dielectric thin films; High-K gate dielectrics; Semiconductor films; Sputtering; Substrates; Temperature;
Conference_Titel :
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
Print_ISBN :
0-7803-7392-8
DOI :
10.1109/ISSM.2000.993712
