DocumentCode
2387962
Title
AMd´s Fab 30 Dresden, Germany
Author
Doran, Jim
Author_Institution
AMD Saxony Manufacturing GmbH Advanced Micro Devices, Inc.
fYear
2000
fDate
2000
Firstpage
454
Lastpage
456
Keywords
Contamination; Copper; Design engineering; Dielectrics; Etching; Lead compounds; Microprocessors; Product design; Semiconductor device manufacture; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2000. Proceedings of ISSM 2000. The Ninth International Symposium on
ISSN
1523-553X
Print_ISBN
0-7803-7392-8
Type
conf
DOI
10.1109/ISSM.2000.993713
Filename
993713
Link To Document