Title :
Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Applications
Author :
Amarasinghe, Ranjith ; Inaba, Kiyeshi ; Dau, Van Thanh ; Dao, Dzung Viet ; Sugiyama, Susumu
Author_Institution :
Ritsumeikan Univ., Shiga
Abstract :
This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel proposed sensor is showing good performance than other miniaturized sensor structures reported thus far.
Keywords :
accelerometers; microsensors; piezoresistive devices; silicon; linear acceleration; piezoresistive effect; piezoresistive micro accelerometer; seismic mass; solid-state three degrees of freedom micro accelerometer; wearable sensing application; Acceleration; Accelerometers; Biomedical monitoring; Bridge circuits; Electromechanical sensors; Mechanical sensors; Piezoresistance; Piezoresistive devices; Solid modeling; Solid state circuits;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2008. MHS 2008. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-2918-9
Electronic_ISBN :
978-1-4244-2919-6
DOI :
10.1109/MHS.2008.4752419
