Development of an automated microinjection system for rapid fabrication of carbon nanotube sensors

A novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multiwalled carbon nanotubes (MWNT) based MIEMS sensor is under development and described in this papler. The system will eventually combine a micro-robotic statiain for microinjection with AC electrophoretic manipulation of inano-wire bundles to produce nano-wire sensors with much more efficiency in cost and time than currently available fabrication1 methods. We have already proved that CNTs can be repeatably manipulated between micro-fabricated electrodes uslng dielectrophoretic manipulation, and demonstrated devices which can serve as novel thermal sensors with low power con!rumption (- pW) and fast frequency response (- 1OOkHz). Our current focus is the develop a feasible batch manufacturable method for functional CNT sensors using an automated microinjection system. The technique of dielectrophoretic manipulation and the design of the microinjection system are presented in this paper.