DocumentCode
2389368
Title
Three-Dimensional Full-Band Simulations of Si Nanowire Transistors
Author
Luisier, Mathieu ; Schenk, Andreas ; Fichtner, Wolfgang
Author_Institution
Integrated Syst. Lab., ETH Zurich
fYear
2006
fDate
11-13 Dec. 2006
Firstpage
1
Lastpage
4
Abstract
In this paper the current characteristics of Si triple-gate nanowire transistors are simulated for different channel orientations. The full-band properties of Si are taken into account via the semi-empirical sp3d5s* tight-binding method. The 3D electrostatic potential is solved self-consistently with the device charge density. This allows the treatment of more realistic transistor structures with rough semiconductor-oxide interfaces along the channel
Keywords
elemental semiconductors; field effect transistors; nanowires; silicon; 3D electrostatic potential; 3D full-band simulations; Si; device charge density; nanowire transistors; semiempirical tight-binding method; Atomic layer deposition; Current density; Electrostatics; FETs; MOSFETs; Poisson equations; Rough surfaces; Slabs; Surface roughness; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location
San Francisco, CA
Print_ISBN
1-4244-0438-X
Electronic_ISBN
1-4244-0439-8
Type
conf
DOI
10.1109/IEDM.2006.346737
Filename
4154338
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