Biochemical Sample Divider Fabricated by SU-8 Mold Process

We developed novel type of a sample divider, which can easily divide the sample solution into multiple small amount of it on a chip, for single molecule analysis by MEMS technologies. We used the composite of a PDMS and an expancel^R as a material, and fabricated the sample divider structure by applying the mold process. The SU-8 mold was fabricated by using laminated bi-layer films on a Si substrate. We investigated the channels closing performance, and they were successfully closed when the volume ratio between the expancel and PDMS solution was 1:2 and the heating time was 5 minutes.