Title :
Electret charging method based on X-ray photoionization for MEMS applications
Author :
Hagiwara, K. ; Goto, M. ; Iguchi, Y. ; Tajima, T. ; Yasuno, Y. ; Kodama, H. ; Kidoko, K. ; Suzuki, Y.
Author_Institution :
NHK Sci. & Technol. Res. Labs., Tokyo, Japan
Abstract :
A novel electret charging method using soft X-ray irradiation is proposed for MEMS applications. It is found that the charging principle is actually based on the photoionization of gas molecules, and the charging time is minimized with Xe as the process gas. In addition, the charged electret has good thermal stability, showing that the present charging method can be applicable to various MEMS electret transducers.
Keywords :
X-ray applications; microsensors; photoelectrets; thermal stability; transducers; MEMS applications; MEMS electret transducers; X-ray photoionization; electret charging method; gas molecule photoionization; soft X-ray irradiation; thermal stability; Ions; Micromechanical devices; Substrates; Thermal stability;
Conference_Titel :
Electrets (ISE), 2011 14th International Symposium on
Conference_Location :
Montpellier
Print_ISBN :
978-1-4577-1023-0
DOI :
10.1109/ISE.2011.6084958
