DocumentCode
2389429
Title
Electret charging method based on X-ray photoionization for MEMS applications
Author
Hagiwara, K. ; Goto, M. ; Iguchi, Y. ; Tajima, T. ; Yasuno, Y. ; Kodama, H. ; Kidoko, K. ; Suzuki, Y.
Author_Institution
NHK Sci. & Technol. Res. Labs., Tokyo, Japan
fYear
2011
fDate
28-31 Aug. 2011
Firstpage
13
Lastpage
14
Abstract
A novel electret charging method using soft X-ray irradiation is proposed for MEMS applications. It is found that the charging principle is actually based on the photoionization of gas molecules, and the charging time is minimized with Xe as the process gas. In addition, the charged electret has good thermal stability, showing that the present charging method can be applicable to various MEMS electret transducers.
Keywords
X-ray applications; microsensors; photoelectrets; thermal stability; transducers; MEMS applications; MEMS electret transducers; X-ray photoionization; electret charging method; gas molecule photoionization; soft X-ray irradiation; thermal stability; Ions; Micromechanical devices; Substrates; Thermal stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets (ISE), 2011 14th International Symposium on
Conference_Location
Montpellier
ISSN
2153-3253
Print_ISBN
978-1-4577-1023-0
Type
conf
DOI
10.1109/ISE.2011.6084958
Filename
6084958
Link To Document