Packaging and characterization of mechanically actuated microtweezers for biomedical applications

Author

Wester, Brock A. ; Ross, James D. ; Rajaraman, Swami ; Allen, Mark G.

Author_Institution

Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2009

fDate

3-6 Sept. 2009

Firstpage

2744

Lastpage

2747

Abstract

This paper presents the successful design, fabrication, and packaging of a mechanically actuated micro-electro-mechanical-systems (MEMS) microtweezer, and its use in a variety of biological environments. This complete and low cost MEMS system has minimal manufacturing complexity and it can be augmented to any standard micromanipulator or positioning system. Characterization of the system shows that precise and controlled tool actuation is achieved with maximal tip closing forces of 367 mN. The system´s performance and ease of use can provide the means to create and enhance a multitude of experimental preparations previously not possible.

Keywords

bioMEMS; biomedical equipment; electronics packaging; micromanipulators; radiation pressure; MEMS system; biomedical applications; controlled tool actuation; mechanically actuated microelectromechanical-systems microtweezer; micromanipulator; packaging; positioning system; Astrocytes; Biomedical Engineering; Cell Membrane; Electrodes; Equipment Design; Humans; Materials Testing; Micro-Electrical-Mechanical Systems; Micromanipulation; Microscopy, Electron, Scanning; Microtechnology; Neurons; Oscillometry; Spinal Cord Injuries; Time Factors;

fLanguage

English

Publisher

ieee

Conference_Titel

Engineering in Medicine and Biology Society, 2009. EMBC 2009. Annual International Conference of the IEEE

Conference_Location

Minneapolis, MN

ISSN

1557-170X

Print_ISBN

978-1-4244-3296-7

Electronic_ISBN

1557-170X

Type

conf

DOI

10.1109/IEMBS.2009.5333335

Filename

5333335