Title :
Design and Performance of a Microactuator with Multi Degrees of Freedom
Author :
Torii, Akihiro ; Banno, Masaaki ; Tanahashi, Tomohiro ; Ueda, Akiteru ; Doki, Kae
Author_Institution :
Fac. of Eng., Aichi Inst. of Technol., Toyota
Abstract :
We describe the design and performance of a microactuator with six degrees of freedom (DOF). The six DOF motion is realized by using six piezo elements and three electromagnets. The microactuator is similar to the Stewart-platform which realizes a small linear and rotational displacement. We utilize the principle of an inchworm which realizes a three DOF large operating area on a surface.
Keywords :
electromagnets; microactuators; Stewart-platform; electromagnets; microactuator; multidegrees of freedom; piezoelements; Adhesives; Connectors; Design engineering; Displacement measurement; Electromagnets; Hydraulic actuators; Leg; Microactuators; Mirrors; Robots;
Conference_Titel :
Micro-NanoMechatronics and Human Science, 2008. MHS 2008. International Symposium on
Conference_Location :
Nagoya
Print_ISBN :
978-1-4244-2918-9
Electronic_ISBN :
978-1-4244-2919-6
DOI :
10.1109/MHS.2008.4752505
