Abstract :
The following topics are dealt with: MEMS/NEMS technology; micro systems and nano systems.
Keywords :
micromechanical devices; nanoelectromechanical devices; MEMS technology; NEMS technology; micro systems; microelectromechanical system; nano systems; nanoelectromechanical system;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752932
