Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction

Author

Kurt-Karsilayan, Nur

Author_Institution

Mentor Graphics Corp., Wilsonville, OR, USA

fYear

2005

fDate

20-24 July 2005

Firstpage

Lastpage

Abstract

Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction is addressed. First, basic nonplanar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling nonplanar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 2 1/2D extraction tool.

Keywords

dielectric materials; integrated circuit interconnections; 2 1/2D parasitic extraction; generic modeling; integrated circuit interconnections; nonplanar dielectric geometry types; nonplanar dielectrics modeling; Air gaps; Conductors; Dielectrics; Geometry; Graphics; Integrated circuit modeling; Parasitic capacitance; Permittivity; Shape; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

System-on-Chip for Real-Time Applications, 2005. Proceedings. Fifth International Workshop on

Print_ISBN

0-7695-2403-6

Type

conf

DOI

10.1109/IWSOC.2005.68

Filename

1530917

Link To Document

https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2390178