Title :
Accurate and efficient design of experiment for reliability assessment. Application to a 20 Å gate oxide
Author :
Monsieur, F. ; Vincent, E. ; Roy, D. ; Bruyere, S. ; Pasqualini, F. ; Pananakakis, G. ; Ghibaudo, G.
Author_Institution :
Central R&D Labs., STMicroelectronics, Crolles, France
Abstract :
This paper provides a complete understanding of the experimental error origins and the way it is propagated in the oxide lifetime projection procedure. As a result the experimental error is controlled and can be optimized. Therefore accuracy well below the 5% threshold is easily achieved
Keywords :
design of experiments; reliability; 20 A; design of experiments; experimental error; gate oxide; oxide lifetime projection; reliability; Design optimization; Error correction; Extrapolation; Integrated circuit reliability; Life estimation; Life testing; Research and development; Sampling methods; Stress; Temperature;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2001. 2001 IEEE International
Conference_Location :
Lake Tahoe, CA
Print_ISBN :
0-7803-7167-4
DOI :
10.1109/.2001.993912
