A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications

Author

Robin, Renaud ; Touati, Samy ; Segueni, K. ; Millet, O. ; Buchaillot, Lionel

Author_Institution

DelfMEMS SAS, Villeneuve d´Ascq

fYear

2008

fDate

9-11 April 2008

Firstpage

56

Lastpage

59

Abstract

This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4 mum) with low actuation voltage (7,5 V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24 GHz applications, based on this design, has been simulated.

Keywords

electrostatic actuators; membranes; microswitches; microwave switches; contact force; electrostatic MEMS switch; free flexible membrane; high reliability; low actuation voltage; microelectromechanical system; single pole double throw; voltage 7.5 V; Arm; Biomembranes; Electrodes; Electrostatics; Extremities; Gold; Low voltage; Microswitches; Radio frequency; Stress; RF MEMS switch; SPDT; electrostatic actuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on

Conference_Location

Nice

Print_ISBN

978-2-35500-006-5

Type

conf

DOI

10.1109/DTIP.2008.4752952

Filename

4752952