Active disturbance rejection control of a MEMS gyroscope

A novel method is proposed for controlling the position of a vibrating proof mass in a z-axis MEMS gyroscope while simultaneously approximating its rotation rate in a third dimension independent of cross coupling terms. Designing the controller to require minimal model information and reject a broad range of disturbances, including the cross coupling terms, dramatically reduces controller complexity over a broader range of applications. A multi sensor solution is also presented for approximating the rotation rate. The proposed method is demonstrated in a simulation of a z-Axis MEMS gyroscope developed by the University of California-Berkeley.