Dynamic modeling of an L-shape PMN-PT piezo-based manipulator

In this paper, we present a modeling scheme of a cantilever-based L-shape manipulator. The L-shape manipulator is made of (1-x)Pb(Mg_1/3Nb_2/3)O_3-xPbTiO₃ (PMN-PT) single-crystal relaxor ferroelectric material. We first report the design of a novel cantilever capable of motion in multiple degrees of freedom. The top and bottom surfaces of the L-shape cantilever structure are printed with interdigitated electrode (IDE), which allow the structure to produce both axial and flexural independently. The dynamic modeling of such a manipulation structure are discussed and presented. The analytical modeling results match well with the finite element analysis and experimental results. The controlled planar manipulator has potential applications in micro- and nano-applications, such as nano-indentation.