A nanostructual microwave probe used for atomic force microscope

Author

Ju, Y. ; Hamada, M. ; Kobayashi, T. ; Soyama, H.

Author_Institution

Dept. of Mech. Sci. & Eng., Nagoya Univ., Nagoya

fYear

2008

fDate

9-11 April 2008

Firstpage

158

Lastpage

161

Abstract

In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 8 mum high, and curvature radius about 50 nm was formed. The dimensions of the cantilever are 250times30times15 mum. The open structure of the waveguide at the tip of the probe was introduced by using FIB fabrication. AFM topography of a grating sample was measured by using the fabricated GaAs microwave probe. The fabricated probe was found having nanometer scale resolution, and microwave emission was detected successfully at the tip of the probe by approaching Cr-V steel and Au wire samples.

Keywords

alloy steel; atomic force microscopy; cantilevers; gold; microwave devices; microwave spectra; nanoelectromechanical devices; nanostructured materials; probes; surface topography; vacuum deposited coatings; waveguides; AFM probe; Au; Cr-V steel; FIB fabrication; FeCCrVJk; GaAs; GaAs wafer; atomic force microscope; cantilever; evaporation deposition; gold film; gold wire; grating topography; microwave emission; nanostructural microwave probe; waveguide; Atomic force microscopy; Atomic measurements; Gallium arsenide; Gold; Gratings; Microwave measurements; Optical device fabrication; Probes; Surface topography; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on

Conference_Location

Nice

Print_ISBN

978-2-35500-006-5

Type

conf

DOI

10.1109/DTIP.2008.4752974

Filename

4752974