DocumentCode
2390941
Title
RF-MEMS beam components: FEM modelling and experimental identification of pull-in in presence of residual stress
Author
Ballestra, Alberto ; Brusa, Eugenio ; Pasquale, Giorgio De ; Munteanu, Mircea Gh ; Somà, Aurelio
Author_Institution
Mech. Dept., Politec. di Torino, Turin
fYear
2008
fDate
9-11 April 2008
Firstpage
232
Lastpage
235
Abstract
In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending.
Keywords
beams (structures); bending; cantilevers; finite element analysis; internal stresses; micromechanical devices; FEM modelling; RF-MEMS beam components; axial behaviour; double clamped microbeams; flexural behaviour; geometrical nonlinearity; mechanical coupling; microbeams; microbridges; microfabrication; out-of-plane and microcantilevers; out-of-plane bending tests; pull-in identification; residual stress; reverse analysis; tensile stress; Capacitive sensors; Gold; Mathematical model; Numerical models; Performance evaluation; Radiofrequency microelectromechanical systems; Residual stresses; Tensile stress; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location
Nice
Print_ISBN
978-2-35500-006-5
Type
conf
DOI
10.1109/DTIP.2008.4752990
Filename
4752990
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