Title :
RF-MEMS switched varactors for medium power applications
Author :
Maury, F. ; Pothier, A. ; Crunteanu, A. ; Conseilet, F. ; Blondy, P.
Author_Institution :
XLII UMR, Limoges
Abstract :
In RF (radio frequency) domain, one of the limitations of using MEMS (micro electromechanical systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched capacitors with an enhanced topology is presented in this paper to prevent it. This kind of device and its promising performances will serve to fabricate a MEMS based phase shifter able to work under several watts.
Keywords :
microswitches; varactors; RF-MEMS switched varactor design; microelectromechanical system switching devices; phase shifter fabrication; power 500 mW; radio frequency domain; Capacitors; Communication switching; Electrostatics; Geometry; Micromechanical devices; RF signals; Radio frequency; Radiofrequency microelectromechanical systems; Signal restoration; Varactors;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752994
