• DocumentCode
    2391186
  • Title

    Hole transport in plasma polymerized organosilicon films

  • Author

    Sielski, Jan ; Kryszewski, Marian

  • Author_Institution
    Polish Acad. of Sci., Lodz, Poland
  • fYear
    1991
  • fDate
    25-27 Sep 1991
  • Firstpage
    11
  • Lastpage
    15
  • Abstract
    Transport of holes in plasma polymerized organosilicon films was investigated. Measurements of electrical conductivity and drift mobility using the time-of-flight (TOF) method were carried out. It was found that a polarization process influenced the transport of holes in pp-HMDSN (plasma-polymerized hexamethyldisilazane). The frozen-in polarization of the sample increases the value of drift mobility. This process is fully reversible and after depolarization the value of drift mobility returns to the previous one (before polarization)
  • Keywords
    dielectric depolarisation; dielectric polarisation; dielectric thin films; electrets; electronic conduction in insulating thin films; polymer films; time of flight spectra; depolarization; drift mobility; electrets; electrical conductivity; hole transport; plasma polymerized organosilicon films; polarization process; time-of-flight method; Amorphous materials; Annealing; Circuits; Conductivity; Current measurement; Plasma measurements; Plasma temperature; Plasma transport processes; Polarization; Polymer films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrets, 1991. (ISE 7) Proceedings., 7th International Symposium on (Cat. No.91CH3029-6)
  • Conference_Location
    Berlin
  • Print_ISBN
    0-7803-0112-9
  • Type

    conf

  • DOI
    10.1109/ISE.1991.167176
  • Filename
    167176