DocumentCode
2391186
Title
Hole transport in plasma polymerized organosilicon films
Author
Sielski, Jan ; Kryszewski, Marian
Author_Institution
Polish Acad. of Sci., Lodz, Poland
fYear
1991
fDate
25-27 Sep 1991
Firstpage
11
Lastpage
15
Abstract
Transport of holes in plasma polymerized organosilicon films was investigated. Measurements of electrical conductivity and drift mobility using the time-of-flight (TOF) method were carried out. It was found that a polarization process influenced the transport of holes in pp-HMDSN (plasma-polymerized hexamethyldisilazane). The frozen-in polarization of the sample increases the value of drift mobility. This process is fully reversible and after depolarization the value of drift mobility returns to the previous one (before polarization)
Keywords
dielectric depolarisation; dielectric polarisation; dielectric thin films; electrets; electronic conduction in insulating thin films; polymer films; time of flight spectra; depolarization; drift mobility; electrets; electrical conductivity; hole transport; plasma polymerized organosilicon films; polarization process; time-of-flight method; Amorphous materials; Annealing; Circuits; Conductivity; Current measurement; Plasma measurements; Plasma temperature; Plasma transport processes; Polarization; Polymer films;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrets, 1991. (ISE 7) Proceedings., 7th International Symposium on (Cat. No.91CH3029-6)
Conference_Location
Berlin
Print_ISBN
0-7803-0112-9
Type
conf
DOI
10.1109/ISE.1991.167176
Filename
167176
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