DocumentCode
2391785
Title
Integrated silicon adaptive mirror
Author
Vdovin, G.
fYear
1994
fDate
28 Aug-2 Sep 1994
Firstpage
297
Lastpage
298
Keywords
Biomembranes; Instruments; Integrated optics; Mirrors; Optical interferometry; Optical sensors; Programmable control; Sensor arrays; Silicon; Surface reconstruction;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN
0-7803-1789-0
Type
conf
DOI
10.1109/CLEOE.1994.636526
Filename
636526
Link To Document