Title :
Integrated silicon adaptive mirror
fDate :
28 Aug-2 Sep 1994
Keywords :
Biomembranes; Instruments; Integrated optics; Mirrors; Optical interferometry; Optical sensors; Programmable control; Sensor arrays; Silicon; Surface reconstruction;
Conference_Titel :
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN :
0-7803-1789-0
DOI :
10.1109/CLEOE.1994.636526
