High-temperature accurate thermal sensing using integrated platinum resistors on silicon

Accurate measurement of the temperature of a micromachined silicon membrane requires high-temperature contact measurement, as pyrometry cannot easily be applied to such sub-mm² heated areas. Conventional silicon processing compatible materials are not suitable for thermal measurement up to 900°C, so a process for the fabrication of on-chip platinum resistors has been developed. High-accuracy over a wide temperature range can be achieved provided that the problems associated with adhesion of platinum on silicon and silicidation are resolved