Title :
On Improving the Predictability of Cycle Time in an NVM Fab by Correct Segmentation of the Process
Author :
Hassoun, Michael
Author_Institution :
Ind. Eng. Dept., Ariel Univ., Ariel, Israel
Abstract :
Based on a simulated fab, we first show that forecasting the steady state cycle time of process segments is possible based on certain segment characteristics. We then show that the cycle time predictability is highly dependent on the choice of the segmentation, with the more efficient segmentation corresponding to the product layers.
Keywords :
data mining; industrial plants; production engineering computing; production management; semiconductor device manufacture; NVM fab; correct process segmentation; cycle time predictability improvement; data mining; product layers; production management; semiconductor fabrication plant; semiconductor most; Availability; Computational modeling; Data mining; Fabrication; Production management; Semiconductor device modeling; Simulation; Production management; cycle time; data mining; semiconductors; simulation;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2283262
