Title :
Pulsed laser processing: novel approach as to fabricate fully isolated transistors for VLSIs
Author :
Ladygin, Eugene A. ; Usenko, Alexander Y.
fDate :
28 Aug-2 Sep 1994
Keywords :
Electrons; Fabrication; Fiber lasers; Integrated circuit technology; Laser ablation; Laser theory; Optical films; Optical pulses; Semiconductor lasers; Very large scale integration;
Conference_Titel :
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN :
0-7803-1789-0
DOI :
10.1109/CLEOE.1994.636560
