DocumentCode
2393793
Title
Laser reactive ablation deposition of thin nitride films
Author
D´Anna, E. ; Leggieri, G. ; Luches, A. ; Martino, Mariapia ; Perrone, A. ; Majni, G. ; Mengucci, P. ; Luk´yanchuk, B.
fYear
1994
fDate
28 Aug-2 Sep 1994
Firstpage
323
Lastpage
323
Keywords
Gas lasers; Laser ablation; Laser modes; Laser theory; Optical pulses; Plasma temperature; Pulsed laser deposition; Scanning electron microscopy; Solid lasers; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN
0-7803-1789-0
Type
conf
DOI
10.1109/CLEOE.1994.636566
Filename
636566
Link To Document